Crystal Phase Control during Epitaxial Hybridization of III‐V Semiconductors with Silicon

Vapor phase epitaxial lifto! of GaAs and silicon single crystal "lms

Among the technologies for integrating GaAs devices with Si VLSI chips, epitaxial lifto! (ELO) is conspicuous for maintaining the quality of the single crystal epitaxial GaAs "lms. Traditionally, ELO is implemented in aqueous HF solution. It would be cleaner and simpler if ELO could be implemented in a vapor process. In this article, we will present the potential improvements in the ELO process...

Stressed solid-phase epitaxial growth of ion-implanted amorphous silicon

The kinetics of stressed solid-phase epitaxial growth (SPEG), also referred to as solid-phase epitaxy, solidphase epitaxial regrowth, solid-phase epitaxial recrystallization, and solid-phase epitaxial crystallization, of amorphous (a) silicon (Si) created via ion-implantation are reviewed. The effects of hydrostatic, in-plane uniaxial, and normal uniaxial compressive stress on SPEG kinetics are...

Epitaxial Silicon Solar Cells

Impurity Redistribution during Silicon Epitaxial Growth and Semiconductor Device Processing

A model has been developed that can account for both front and back "autodoping" effects during epitaxial growth as well as impurity redistribution during further high-temperature processing. The model incorporates three dopant fluxes, i.e., (i) the flux from the solid into the gas phase at the rear of the wafer, (ii) the flux from the solid to the front surface of the wafer, and (iii) the flux...

Electroluminescence of nanopatterned silicon with carbon implantation and solid phase epitaxial regrowth.

Electroluminescence at 1.28mum is observed in a nanopatterned silicon test structure that has been subjected to carbon implantation followed by solid-phase epitaxial regrowth for recrystalization. The sub-bandgap luminescence comes from a di-carbon complex known as 'G center'. Enrichment of silicon with carbon atoms has been achieved in a procedure consisting of two implantations and solid-phas...